Contactless interference 3D profilometer “Micron-alpha”

Purpose

for a surface microtopography research by the method of processing of the sequence of interference data at partly coherent illumination.

Main technical specification

  • scanning field (X,Y), µm……..……100 ÷ 300
  • horizontal resolution (X,Y), µm ………...0,15
  • maximum measured height (Z), µm ……...40
  • vertical resolution (Z), nm …………….……5
  • scanning time, min……………..….........0,1-1

The device gives a possibility

  • to render two- and three-dimensional images of surface,
  • to estimate quantitatively relief characteristics,
  • to measure the thickness of thin films,
  • to carry out metallurgical study.

Fig. 1 (right). General view of profilometer “Micron-alpha”.

 

2D (left) and 3D (right) relief of the object- micrometer

 

 

Contacts: 
Ukraine, V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine, E. Svezhentsova (e-mail: [email protected])